@ƒVƒŠƒRƒ“ή—Ώ‚Μ‰ΘŠw‚Ζ‹ZpƒtƒH[ƒ‰ƒ€2010
@@The Forum on the Science and Technology of Silicon Materials 2010



11ŒŽ14“ϊi“ϊj

16:00-19:00 Registration
18:00-20:00 Welcome Party




11ŒŽ15“ϊiŒŽj

AM

8:25-8:35    Opening address @@γ‰Y—mˆκ 


8:35-9:00 GoeselζΆ’Η“‰ƒZƒbƒVƒ‡ƒ“ ΐ’·: γ‰Y—mˆκ 

  8:35-9:00   ˜a“cˆκŽΐi“Œ‘εj  Farewell Ulrich Goesele


9:00-10:40 Œ‹»¬’· ΐ’·: Ž­“‡ˆκ“ϊ™ZC ––‰ͺ_Ž‘

  9:00-9:40   ˆ’•”F•viM‰z”Ό“±‘́j @Point Defects in Silicon Melt Growth from the Experimental Results
  9:40-10:10   ’τ “ցiƒVƒ‹ƒgƒƒjƒbƒNj @450 mm Wafer Generation - Challenges for the Silicon Producer
  10:10-10:40  ‘ΎŽq•q‘₯iMB‘εj @Czochralski Germanium Crystal Growth with Low Dislocation Density and Oxygen Impurities


10:40-11:00 Coffee Break


11:00-12:40 Œ‡ŠΧ§Œδ₯•]‰Ώ ΐ’·: ‹ΰ“cŠ° C ¬–μt•F

  11:00-11:40 G. KissingeriIHPj @Initial Stages Oxygen and Vacancy Agglomeration: Kinetics and Getter Effects
  11:40-12:10 ŽR WiƒRƒoƒŒƒ“ƒgj @Technology Trends and Business Challenges in Silicon Wafer Industry
  12:10-12:40 ΅‰γKˆκ˜Y(ƒ\ƒj[j @Process-induced Metal Contamination in Silicon Substrate and its Gettering Behavior


12:40-13:40 Lunch

PM

13:40-15:10 Œ‡ŠΧ•]‰Ώ  ΐ’·: ¬–μt•F C γ‰Y—mˆκ

  13:40-14:10 ’I‹΄Žli•xŽm’ΚMEj @Progress of Silicon Wafer for Advanced CMOS LSI (tentative)
  14:10-14:40 ŠΦŒϋ—²ŽjiNIMSj @EBIC and Cathodoluminescence Study on the Grain Boundaries and Fe Impurities in Multicrytstalline Si for Solar Cell Application
  14:40-15:10 ‚‹΄‘τ“ρi“Œ‘吢Œ€j @Nano-probe Characterization of Multicrystalline Si Solar Cell Materials


15:10-15:30 Coffee Break


15:30-17:10 SiGeCGe ΐ’·: ’†“‡Š° C ––‰ͺ_Ž‘

  15:30-16:10 J. Vanhellemont
@iGhent Univ.j
@Intrinsic Point Defect Clustering During Czochralski Growth of Silicon and Germanium
  16:10-16:40 ‚–ؐMˆκi“Œ‘εj @Prospective and Critical Issues of Ge-based CMOS Devices
  16:40-17:10 Žθ’Λ •Χi“ŒŽΕj @Fabrication Process of SiGe-on-insulator (SGOI) Substrates for CMOS Applications


17:10-17:30 Coffee Break


17:30-19:00 ƒVƒ‡[ƒgƒvƒŒƒ[ƒ“ƒe[ƒVƒ‡ƒ“   @@ΐ’·: ‹g“c–L


19:00-20:00 Supper


20:00-21:30 ƒ|ƒXƒ^[ƒZƒbƒVƒ‡ƒ“   ΐ’·: ‹g“c–L





11ŒŽ16“ϊi‰Ξj

AM

8:30-10:10 SiƒtƒHƒgƒjƒNƒX   ΐ’·: Ξμ–υ•F C ˜a“cˆκŽΐ

  8:30-9:10 J. Michel (MIT) @Monolithic Germanium Photonic Devices on Silicon
  9:10-9:40 ŽR“c_Ž‘iNTTj @Integrated Silicon Photonics for Telecommunications Applications
  9:40-10:10 ”nκr•Fi‰‘•l‘‘εj @Silicon Photonics


10:10-10:30 Coffee Break


10:30-12:00 ‚l‚d‚l‚r  ΐ’·: ²“‘—F”ό C ‹ΰ“cŠ°

  10:30-11:00 ‰ͺ“c—Ί“ρi“ϊ—§) @MEMS Sensor and Trend of the Market
  11:00-11:30 Ξμ’qOiL‘ε) @On-chip Immunoassay Using Magnetic Beads Manipulation
  11:30-12:00 θ… ‹I‰ i“Œ–k‘εj @Micro Machining of Silicon, Germanium and Silicon Carbide


PM

12:00 ƒOƒ‹[ƒvŽΚ^ŽB‰e
12:30-18:00 ƒGƒNƒXƒJ[ƒVƒ‡ƒ“

18:00-21:30 Banquet





11ŒŽ17“ϊi…j

AM

8:30-10:00 SiCEƒpƒ[Si ΐ’·: ‘ε’J Έ C ‘Ίγ i

  8:30-9:00 –Ψ–{P’¨i‹ž‘εj @Progress in Defect Control of SiC for Power Device Applications
  9:00-9:30 ΌΰVLˆκ(ŽY‘Œ€) @Next Generation Wafer Technology for Green Electronics Age
  9:30-10:00 ™ŽR—²‰pi–L“c’†Œ€j @Silicon Power Devices in Automotive Applications


10:00-10:20 Coffee Break


10:20-12:00  ‘Ύ—z“d’r ΐ’·: Š`–{_ˆκ@C ƒVƒƒƒoƒj[

  10:20-11:00 B. SoporiiNRELj @Defects in Multicrystalline Silicon: Their Influence on the Solar Cell Performance
  11:00-11:30 ŽαΌ ’qiƒgƒNƒ„ƒ}j @A New Solar Grade Silicon and The Application To Multiclystalline Solar Cell
  11:30-12:00 ‰F²”ό“Ώ—²i“Œ–k‘εj @Toward Realization of High-quality Multicrsytalline Silicon for Solar Cells


12:00-12:40 Snack


PM

12:40-14:30  ‘Ύ—z“d’r  ΐ’·: ¬–ΈŒϊŽu@CŠΦŒϋ—²Žj

  12:40-13:20 M. Schubert
@@(Fraunhofer)
@Characterization of Silicon for Photovoltaics
  13:20-13:50 Šβ–{’Ό‹viJFSj @Study on the Fixed Abrasive Diamond Wire Saw Slicing of Silicon Ingot for Photovoltaic Applications
  13:50-14:20 “c“‡“Ή•v(JAXA) @Donor-Acceptor Pair Luminescence and its Application to Impurity Analysis in Solar-Grade Si


14:20-14:30 Closing remarks  @@ γ‰Y—mˆκ



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